Películas delgadas de nitruro de aluminio (ALN)


Authors

  • Jaime Andrés Pérez Taborda

DOI:

https://doi.org/10.22517/23447214.1291

Abstract

Este documento pretende hacer una revisión de las principales características estructurales y morfológicas del nitruro de aluminio –AlN- específicamente cuando este es depositado por Magnetrón Sputtering ó por medio de Ablación Láser (PLD). Igualmente como influyen los parámetros de crecimiento como presión de gas ambiente (N2), temperatura de sustrato o tiempo de deposición en la calidad y orientación cristalina de las películas delgadas de AlN.

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Published

2011-08-30

How to Cite

Pérez Taborda, J. A. (2011). Películas delgadas de nitruro de aluminio (ALN). Scientia Et Technica, 2(48), 218–223. https://doi.org/10.22517/23447214.1291

Issue

Vol. 2 No. 48 (2011)

Section

Ciencias Básicas

License

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